Inside an ASML TWINSCAN machine | ASML | 37 comments
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Inside an ASML TWINSCAN machine | ASML | 37 comments
37 viewsSep 17, 2023
linkedin.com
ASML Developing Next-Gen EUV Lithography
ASML Developing Next-Gen EUV Lithography
Dec 5, 2018
ieee.org
【ASML 週報｜誰能比它快！眨眼間就有 7G 的加速度高速移動😱】 猜猜看，由 ASML 生產的 TWINSCAN NXT 每小時可以曝光多少片晶圓？答案是 295片！相較早期的 TWINSCAN 系統相比，每天可以額外交付 400-500 個晶圓。雙晶圓平台能在同一時間移動兩片矽晶圓：其中一邊的晶圓進行曝光；另一邊的晶圓同時進行量測。 要達到這個生產速度，晶圓平台需要以高達 7G 的加速度高速移動。 #7G是什麼概念？ 小編拿 F1 賽車比較給你聽~ 👉 F1 賽車從 0 加速到 100km/h 平均約需 2.5 秒 👉 7G 加速度從 0 到 100km/h 只需要約 0.4 秒！比眨眼的速度還快😉 #從微影製程談起 微影是半導體製程量產的關鍵步驟，是透過曝光和顯影在光阻層上刻畫幾何圖形結構，接著透過蝕刻將光罩上的圖形「轉印」到晶圓上的過程。 #光速運行的雙晶圓平台 ASML 的「雙晶圓平台」是定位模組（Positioning Module）擔當，整合了機械電子學、光學設計與量測學（包含量測、數據處理及控制），能在同一時間移動兩片矽晶圓。 #搭配影片看更有感 👉 右邊的
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【ASML 週報｜誰能比它快！眨眼間就有 7G 的加速度高速移動😱】 猜猜看…
30K viewsJun 13, 2023
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【ASML EUV微影設備｜雙晶圓平台處理技術⚙️】 ASML TWINSCAN曝光機中的晶圓平台（Wafer Stage）是微影設備中關鍵的定位模組（Positioning Module），在系統設計上整合機械電子學、光學設計及量測學（包含量測、數據處理及控制）。雙晶圓平台能在同一時間移動兩片矽晶圓：其中右邊的晶圓曝光於EUV極紫外光下，將電路設計圖影像（Pattern）刻在晶圓上；左邊的晶圓同時由機台的量測儀器優化其準確度（Alignment）。兩個平台交替執行微影和量測功能，並以電磁的方式移動，在無摩擦力的作用下能加速至7G❗️ 這就是ASML的微影系統如何在晶片量產時得以兼顧準確性及生產速度的關鍵。⚡️ #ASML #EUV #WaferStage | ASML
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【ASML EUV微影設備｜雙晶圓平台處理技術⚙️】 ASML TWINSCAN …
74.4K viewsJun 11, 2019
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How to Tell the Olsen Twins Apart: Mary-Kate and Ashley Differences
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Oct 15, 2018
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30 reactions | ＼ASML Tech｜まばたきより早い7Gの加速度／ ASMLが製造するTWINSCAN...
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30 reactions | ＼ASML Tech｜まばたきより早い7Gの加速度／ ASML …
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