This article describes the basic optical principles in the lithographic tool, with the resulting positioning accuracy requirements. For three generations of lithographic tools, the mechatronic ...

The direct position determination (DPD) algorithms have been shown to outperform conventional two-step methods in localization accuracy under poor observation conditions (e.g., low signal-to-noise ...

In this study, superlight adsorbent sponges (bulk density 0.016–0.049 g·cm –3) were developed based on graphene oxide (GO) cross-linked with poly (vinyl alcohol) (PVA). The interlayer spacing of the ...