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IEEE

First Demonstration of Work Function-Engineered BEOL-Compatible IGZO Non-Volatile MFMIS AFeFETs and Their Co-Integration with Volatile-AFeFETs

Abstract: For the first time, non-volatile antiferroelectric FETs (NVAFeFETs) with a metal-AFe-metal-insulator-semiconductor (MFMIS) structure are realized employing a replaced floating gate (FG), ...